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Non-contact optical imaging of semiconductor features smaller than 100 nanometers

SMAL (Super Resolution Microsphere Magnifying Lens) technology can be used for non-contact, non-damaging semiconductor chip and silicon wafer manufacturing quality inspection.

Because SMAL uses white light, it reveals the nanoscopic world in full color. The Nanoro M super-resolution nano-scanning optical microscope can be used for inline inspection, which cannot be done by scanning electron microscopes and atomic force microscopes. High-quality inspection = better quality control = cost savings and manufacturing efficiency.

The picture on the right shows the comparison between SMAL technology and ordinary optical microscope chip nanostructure imaging.

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