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Current patterning techniques that use near-field optics to generate surface features below 100 nm all share two big disadvantages: low throughput and the need for sophisticated distance-control equipment.
To overcome these problems we have developed an innovative, highly effective technique for nanopatterning across large surface areas. This is a fully automated, integrated laser scanning surface patterning system based on the multiple focusing effect of a microsphere lens array (MLA).
How it works
The MLA converts the single incident laser beam into multiple focused beam spots (down to 30nm resolution), each spot generates a feature on the substrate surface simultaneously. The laser scanning contributes to the high density and flexible shapes of the patters/features generated.