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With a resolution better than 100 nm and 230 - 240 x magnification you can break the diffraction limit, not your sample.

Our SMAL AIR lens is an immersion free, non-contact super-resolution objective for the NANORO M.

*image for illustrative purposes only

World leading optical resolution
for advanced materials inspection

Our SMAL AIR lenses can resolve features beyond the diffraction limit of light down to sub 100 nm. Coupled with our NANORO scanning stages they can perform super-resolution scans of large areas rapidly and non-destrutively.

SMAL AIR Specifications

Frequently Asked questions

What is the SMAL AIR lens?

Designed in response to customer feedback, the SMAL AIR lens is an immersion free, non-destructive version of our Super-resolution Microsphere Amplifying Lens (SMAL).  

Does it touch the sample?

No, it is non-contact.

What light source do we use?

It is a standard white light LED.

What is the maximum resolution I can achieve with SMAL AIR?

We can typically resolve below 100 nm with white light. We can also ‘see’ some features down to around 50 nm, on certain samples.

What is the magnification of the lens?

Current state-of-the-art objective lenses offer a magnification of up to x150. SMAL AIR offers a magnification of around x230 to x240.

What is the working distance of SMAL Air

c. 200 nm

Do I need special equipment to use a lens?

Best results are seen on Nanoro-M due to the dedicated design of its light source. However, these lenses have been used on other manual microscopes, so it is possible. Please talk to us if you have a specific question and we will be glad to help.

Do you have any testimonials?

Yes, we have working with SamsungElectronics (Korea) who have kindly allowed us to quote their Dr Soonyang Kwon, Staff Engineer, Metrology & Inspection, “Lots of people are very satisfied with the performance of NANORO at Samsung Electronics, Korea.”

What if I damage a lens?

Instead of buying a new lens, as would be the case with other objective lenses, LIG is able to refurbish the SMAL AIR lens, saving you money and possibly time too

What application areas can benefit from SMAL AIR?

SMAL AIR is ideal for applications that require high resolution in environments where an immersion medium is not permitted.
- Semicon fabricator plants
- Semicon R&D facilities
- Semicon quality and analysis
- Advanced materials that are water soluble

What are the sample’s requirements?

Any flat/smooth, high-contrast sample. Good examples are polished geology/mineralogy samples and semiconductor wafers.

Does SMAL AIR work on any microscope?

SMAL AIR has been used on several industry-leading microscopes, including Nikon, Leica and Sunny, as well as our own Nanoro-M. Further information is forthcoming. Please sign up to our newsletter for further updates.

Has it been used in a vacuum before?

Yes, please see our Technical Note#10 for description of exactly this topic.

Have an unanswered question?

We would love to here from you. Get in touch here or drop us a call on 0161 342 0515.

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(+44) 161 342 0515