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Material ScienceS
Top - down investigation of a micro-chip with Immersion SMAL using Nanoro M.
Image 1: Wide-area scan of 1 mm × 1 mm acquired with a 10× objective lens using Nanoro M.
Image 2: Large-area scan of 100 µm × 100 µm captured with a 100× oil-immersion lens using Nanoro M.
Image 3: Snapshot of the microchip obtained with the SMAL immersion mode.
Image 4: Magnified view of Image 3, showing 65 nm features measured with Nanoro Software.
Image 5: Targeted scan of a 50 µm × 50 µm region of the microchip using SMAL immersion on Nanoro M.
Image 6: Magnified view of Image 5, showing 80 nm features measured with Nanoro Software.
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SEMI-CONDUCTORS
Image comparison between the SMAL lens and a standard microscope objective lens.
Scan of a micro-chip using the Nanoro Generation in normal mode and blue mode reaveling 60 nm features:
Different example of applications :
Due to the short working distance of the SMAL lens (1.7 (+-0.1) micrometer).
The sample requiere a perfect flatness.
AAO - 150 nm pores
Photonic crystal fiber core
Scan of ferroelectric Domains
Scan of a solar cells
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