Our SMAL lenses use a microsphere super lens to go past the diffraction limit of light. Depending on the sample users can achieve lateral resolutions of up to 80 nm.
Due to the working distance and field of view of the SMAL lens we recommend that it is used solely in conjunction with a NANORO M system.
Immersion Type: oil / de-ionised water
Microsphere Field of view:
Offline Semiconductor Failure Analysis
Advanced Materials Imaging
Download our Application Notes
Rapidly inspect electrical faults < 100 nm without sputtering, coating, and without the need for specific environmental conditions.See More